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Electron Beam Lithography | Ústav přístrojové techniky
The EBL group deals with the research in the field of microlithographic technologies using e-beam pattern generators.
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Alisi - Special technologies - Application Laboratories of the…
The process takes place in a high vacuum (pressure 10−2 to 10−3 Pa), most often without additional material. Thanks to very high power concentration, the focused beam penetrates rapidly into the metal, producing a deep and narrow weld.
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